X-ray Photoelectron Spectroscopy / XPS

PHI QuantesNEW

PHI Quantes

Pioneer into a new area with an XPS equipped with both hard X-ray & conventional soft X-ray source.

PHI 5000 VersaProbe III

Multi-technique scanning XPS microprobe that provides the highest performance spectroscopy with a sophisticated equipment design.

PHI X-tool

This high performance scanning XPS instrument comes with a low price yet makes measurements for all types of applications and features easy, intuitive operation.

Auger Electron Spectroscopy / AES, SAM

PHI 710

The only scanning Auger nanoprobe in the world that guarantees a field emission electron source whose spatial resolution is 8 nm or less.


Time-of-Flight SIMS / TOF-SIMS


This new TOF-SIMS instrument has the added flexibility needed to support diversified analysis application and also provides automated measurement from sample loading through to measurement.


Dynamic SIMS / D-SIMS

Other Services

Refurbished Equipment