NEW
PHI Quantes
Pioneer into a new area with an XPS equipped with both hard X-ray & conventional soft X-ray source.
Products
X-ray Photoelectron Spectroscopy / XPS
NEW
PHI Quantera II™
The world's highest performance XPS microprobe that provides automated micro-area spectroscopy.
PHI 5000 VersaProbe III
Multi-technique scanning XPS microprobe that provides the highest performance spectroscopy with a sophisticated equipment design.
PHI X-tool
This high performance scanning XPS instrument comes with a low price yet makes measurements for all types of applications and features easy, intuitive operation.
Auger Electron Spectroscopy / AES, SAM
PHI 710
The only scanning Auger nanoprobe in the world that guarantees a field emission electron source whose spatial resolution is 8 nm or less.
PHI 4700 Thin Film Analyzer™
The analyzer employs a high sensitivity energy analyzer having the world's best Auger sensitivity of 1.6 Mcps (10 nA for current value).
Time-of-Flight SIMS / TOF-SIMS
PHI nanoTOF II™
This new TOF-SIMS instrument has the added flexibility needed to support diversified analysis application and also provides automated measurement from sample loading through to measurement.
Dynamic SIMS / D-SIMS
