About Us

Our Business

ULVAC-PHI, Inc. provides X-ray Photoelectron Spectroscopy (XPS) Microprobe, Secondary Ion Mass Spectrometer (TOF-SIMS, D-SIMS), and Scanning Auger Electron Spectroscopy (AES) Nanoprobe, as the world's leading supplier of advanced UHV surface analysis instruments.

Corporate Information

We receive various opinions from our customers about everything from quality control to research and development. Listening to those opinions allows us to accommodate diverse needs through superior surface analysis technologies and an excellent after-sale service system.
ULVAC-PHI provides unique product development and cutting-edge surface analysis solutions to contribute to next-generation engineering technologies.