NEW
PHI GENESIS
Fully-automated multi-technique scanning XPS/HAXPES microprobe
Products
X-ray Photoelectron Spectroscopy / XPS
NEW
PHI Quantes
Pioneer into a new area with an XPS equipped with both hard X-ray & conventional soft X-ray source.
Auger Electron Spectroscopy / AES, SAM
PHI 710
The only scanning Auger nanoprobe in the world that guarantees a field emission electron source whose spatial resolution is 8 nm or less.
Time-of-Flight SIMS / TOF-SIMS
NEW
PHI nanoTOF 3+
This new TOF-SIMS instrument has added new unique features and enhanced automated analysis from sample loading through to measurement.
Dynamic SIMS / D-SIMS
