StrataPHI is a new software product for estimating the structure of thin-film stacks from spectral and angle-dependent XPS (ADXPS) data. StrataPHI calculates thickness for thin-film structures composed of discrete layers. For multi-layer samples with unique chemistry in each layer, the thickness can be calculated from a single spectral data set.

Applications

• Multi-layer thin film thickness and composition
• Ultrathin 2-dimensional materials thickness and composition
• Adventitious carbon thickness
• Surface coverage (atoms/cm²) High-throughput metrology tool for thin-film structures

For 90 days evaluation copy, please contact ULVAC-PHI.