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PHI GENESIS
Fully-automated multi-technique scanning XPS/HAXPES microprobe
Fully-automated multi-technique scanning XPS/HAXPES microprobe
Pioneer into a new area with an XPS equipped with both hard X-ray & conventional soft X-ray source.
The only scanning Auger nanoprobe in the world that guarantees a field emission electron source whose spatial resolution is 8 nm or less.
This new TOF-SIMS instrument has added new unique features and enhanced automated analysis from sample loading through to measurement.