Introduction of a new charge-up countermeasure using GND Probe Holder in AES measurement

[Overview]
In AES measurement, charge-up presents a major challenge when measuring insulators or minute areas on them, making accurate evaluation difficult. Countermeasures such as neutralizer gun irradiation, sample tilting, and the use of masks have been employed, but stable measurement has required extensive trial and error each time. This seminar introduces the newly developed “GND Probe Holder,” which ensures conductivity through physical contact. By combining this tool with the PHI 710, it is possible to suppress the effects of charge-up and achieve stable analysis of minute areas. The seminar will focus on explaining the operating principle of the GND Probe Holder and examples of elemental identification and chemical state evaluation of tin bumps formed on resist, which is an insulator.