Unveil the
surface.
Shape the future.
The world's leading XPS / AES / TOF-SIMS / Q-pole-SIMS instruments.
Introducing PHI GENESIS, our flagship XPS system. With best-in-class sensitivity and spatial resolution, it visualizes surface chemistry for semiconductors, batteries, biomedical research, and virtually any advanced material.
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XPS X-ray Photoelectron SpectrometerPHI GENESIS
- Spatial Resolution < 6 µm
- Air-Free Transfer
- High-Speed Mapping
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AES Auger Electron SpectrometerPHI 710
- 8 nm Spatial Resolution
- High-Stability Electron Gun
- In-Situ Analysis
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TOF-SIMS Time-of-Flight Secondary Ion Mass SpectrometerPHI nanoTOF 3+
- High Mass Resolution
- GCIB Dual-Gun
- 3D Mapping
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Q-pole-SIMS Quadrupole Secondary Ion Mass SpectrometerPHI ADEPT 2
- Depth Profiling Optimized
- Trace Elements at ppb Level
- High Throughput
Advancing manufacturing through the science of surface analysis.
The surface of a material — just a few nanometers thick — plays a crucial role in determining a product's performance, quality, and safety. Surface analysis is the technology that precisely characterizes the elemental composition and chemical state of this ultrathin layer.
ULVAC-PHI is a manufacturer developing and supplying world-class surface analysis instruments, including XPS, AES, and TOF-SIMS. We support research and development as well as quality control on the front lines of diverse industries, from semiconductors to advanced materials and pharmaceuticals.
APPLICATIONS
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Semiconductor
Supports process development and yield improvement through compositional analysis of thin films and fine structures, and identification of contaminants.
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Thin Film & Coating
Precisely characterizes the composition and structure of thin films and coatings designed for corrosion protection, wear reduction, and adhesion enhancement.
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Materials R&D
Analyzes the microstructure and grain boundary composition of alloys, glass, and ceramics, contributing to improved product performance.
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Magnetic Media
Applies surface analysis to evaluate nanoscale protective coatings and magnetic recording layers, and to detect contaminants on components.
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Polymer
Evaluates polymer surface modifications and contamination, supporting improvements in adhesion and wettability, as well as the development of functional materials.
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Pharmaceuticals
Surface analysis plays a key role in characterizing compositions that affect drug efficacy and detecting foreign matter in formulations.
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Biomedical
Quantitatively analyzes surface organic species and functional groups for biocompatibility assessment and biosensor development.
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CONTACT
Feel free to contact us with any questions about our products, analysis services, or careers.