COMPANY
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About & History
Company Profile
| Company Name | ULVAC-PHI, Inc. | ||||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Established | November 1, 1982 | ||||||||||||||||
| Capital | 100 million yen | ||||||||||||||||
| Shareholder | ULVAC, Inc. | ||||||||||||||||
| Board of Directors and Auditor |
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Milestones
May 1969
Physical Electronics Inc. (PHI) forms as one of the first specialty companies for surface analysis instruments in the world, developed by Dr. R. E. Weber of the University of Minnesota.
April 1971
Japan Vacuum Engineering Co., Ltd. (now known as ULVAC, Inc.) concludes general agent agreements in Japan with PHI.
November 1982
PHI and Japan Vacuum Engineering Co., Ltd. dissolve general agent agreements to establish the joint-venture company ULVAC-PHI, Inc.
1983
Opens Osaka branch office.
September 1997
Chigasaki headquarter and factory move to the newly-built office.
February 2003
ULVAC-PHI, Inc. purchases the R&D surface analysis instrument division and becomes the leading company in the manufacture and sales of surface analysis instruments.Establishes Physical Electronics USA (PHI-USA).
December 2003
Acquired a U.S.-based service division, establishing a global instrument maintenance network.
November 2004
ULVAC-PHI, Inc. starts sales of X-ray Photoelectron Spectroscopy with a C60 ion gun.
December 2008
Releases the newly-developed Gas Cluster Ion Gun.
September 2010
Releases the “PHI Quantera II” Scanning XPS Microprobe.
September 2011
Releases the “PHI X-tool” Automated XPS Microprobe.
November 2012
Releases the “PHI 710” Scanning Auger Nanoprobe.
February 2015
Releases the “PHI nanoTOF II” Time-of-flight SIMS.
May 2016
Releases the “PHI 5000 VersaProbe III” Scanning XPS Microprobe and Scanning Auger Electron Spectrometer “PHI 4800“.
October 2016
Releases the “Parallel imaging MS/MS option” for the PHI nanoTOF II.
February 2017
Releases the “PHI Quantes” Dual Scanning X-ray (Al Kα & Cr Kα) Photoelectron Microprobe.
Mach 2017
Began sales of the high-speed spectroscopic ellipsometer “PHI QuickSE” series.
August 2017
Headquarter and factory relocate to the ULVAC headquarter.
October 2021
Releases the “PHI VersaProbe 4” Scanning XPS Microprobe and the “PHI nanoTOF 3” Time-of-flight SIMS.
July 2022
Releases the “PHI GENESIS” Scanning XPS/HAXPES Microprobe.
August 2023
Osaka branch office closed.
October 2023
Releases the “PHI nanoTOF 3+” Time-of-flight SIMS.
November 2023
ULVAC PHI Instruments Co., Ltd. established in China.
July 2026
Released the quadrupole-type secondary ion mass spectrometer “PHI ADEPT 2.”
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