Multifunctional scanning X-ray photoelectron spectrometer (XPS)
PHI 5000 VersaProbe III NEW
Key Technology
・High-sensitivity micro-analysis using proprietary hardware
・Highly reliable automation technology
・Hardware pursuing ultimate depth resolution
・Rich variety of options
Scanning Auger electron spectrometer (AES)
PHI 4800 NEW
Key Technology
・Next-generation Auger with the highest sensitivity
・Chemical state analysis of minute areas
・Easy charge neutralization of insulators
・High-throughput analysis through automated measurement
Related Information Links
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