Software

StrataPHI

Angle-Resolved XPS / HAXPES Data Processing Software

StrataPHI is a software product that estimates the structure of multilayer thin films from spectral and angle-dependent XPS (ADXPS) data.

StrataPHI can calculate the thickness of thin film structures consisting of discrete layers. In addition, for multilayer samples with unique chemical properties in each layer, the thickness can be calculated from a single spectral dataset.

Features

  • Estimates the depth order of elements from angle-resolved XPS/HAXPES data and displays the thickness of each layer in a depth profile format.
  • For multilayer film samples with known chemical composition, thickness can be calculated from data at a single take-off angle.
  • Models can be saved and reloaded.
  • Automatic output to PowerPoint and Excel is also supported.
  • Enables data analysis from all PHI XPS instruments.

Application Range

  • Thickness Calculation of Multilayer Thin Films
  • Contaminant Carbon Thickness Calculation
  • Surface Coverage Calculation (atoms/cm²)
  • High-Throughput Measurement of Thin Film Structures
StrataPHI GUI Screen

Contact Us

For our existing PHI MultiPak users who are considering purchasing StrataPHI, please contact us using the form below for any inquiries or quotation requests.

For Members

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CONTACT

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