PRODUCTS

Products

XPS X-ray Photoelectron Spectroscopy
PHI GENESIS
XPS

PHI GENESIS

Fully-automated multi-technique scanning XPS/HAXPES

Next-generation scanning XPS microprobe achieving both best-in-class spatial resolution and high sensitivity. Rapidly and accurately analyzes the composition and chemical state of battery materials and thin-film devices.

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AES Auger Electron Spectroscopy
PHI 710
AES

PHI 710

Auger Electron Spectroscopy

A scanning Auger electron spectroscopy system boasting nanoscale high spatial resolution. Accurately analyzes elemental distribution and chemical states in microscopic regions.

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TOF-SIMS Time-of-Flight SIMS
PHI nanoTOF 3+
TOF-SIMS

PHI nanoTOF 3+

Time-of-Flight SIMS

A time-of-flight secondary ion mass spectrometry system achieving high sensitivity at the ppm level. Applicable to distribution analysis and depth profiling of trace components in both organic and inorganic materials.

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Q-pole-SIMS Quadrupole SIMS
PHI ADEPT 2
Q-pole-SIMS

PHI ADEPT 2

Quadrupole SIMS

High-sensitivity Q-pole SIMS. Ideal for depth profile analysis of trace elements, providing high reproducibility required in semiconductor process development and quality control.

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Software
PHI MultiPak Integrated analysis software for surface analysis data. Centralizes peak identification, state analysis, and mapping processing of XPS, AES, and TOF-SIMS data. View Details StrataPHI Depth Profile Analysis Module (MultiPak Option) View Details TOF-DR (Coming Soon) View Details
Books / Database
Handbook of X-ray Photoelectron Spectroscopy XPS Reference Data · Standard Handbook of Chemical Binding Energies View Details Handbook of Auger Electron Spectroscopy Standard Handbook of AES Data. Includes Peak Energies and Sensitivity Factors. View Details Surface Analysis by Auger and XPS A specialized reference book covering the theory and practice of surface analysis techniques. View Details ToF-SIMS: Materials Analysis by Mass Spectrometry A specialized reference book explaining the theory and application examples of materials analysis by mass spectrometry. View Details XPS Polymer Database XPS Spectral Database for Polymer Materials View Details Static SIMS Library Mass Spectral Library for Static SIMS View Details
USED EQUIPMENT
Refurbish

We also handle the sale of pre-owned surface analysis instruments (XPS / AES / TOF-SIMS and others). Please feel free to contact us regarding availability, specifications, and pricing.

CONTACT

Feel free to contact us with any questions about our products, analysis services, or careers.