In survey imaging, wide spectra are measured at every image pixel.
- After measurement, wide spectra can be extracted from regions with different image contrast, enabling easy qualitative and quantitative compositional analysis.
- Survey images can be reconstructed by LLS processing using the wide spectra extracted from different regions as references.
- Imaging of elements identified in the wide spectrum can be reconstructed after measurement.
- The image in step 3 can also be further developed into chemical imaging.
Survey imaging, which enables wide spectrum extraction from every pixel, avoids the need for re-measurement and achieves ideal AES imaging.
*LLS: Linear Least Squares Fitting
Instrument Information Links
Scanning Auger Electron Spectrometer AES
