ULVAC-PHI, Inc. (President and Representative Director, Hiroshi Yamamoto) received the Industry Award from the Surface Science Society of Japan (Public Interest Incorporated Association) for the achievement of “Development and Commercialization of a Gas Cluster Sputtering Gun for Surface Analysis.”
The Industry Award of the Surface Science Society of Japan is an award given to products, technical know-how, or similar achievements recognized as having made a significant contribution to the advancement and development of industries related to surface science.
Through the development and commercialization by ULVAC-PHI, Inc., analysis of organic materials using X-ray photoelectron spectroscopy (XPS) and time-of-flight secondary ion mass spectrometry (TOF-SIMS) has achieved significant advancement.
In surface analysis instruments equipped with this device, ultra-low-damage sputtering by argon clusters was demonstrated, and ultra-low-damage depth profile state analysis of organic materials and removal of surface contamination were realized.
The award ceremony was held on December 15, 2011, at Tower Hall Funabori, during the 31st Surface Science Academic Conference.(Notice of Selection of Industry Award Recipients for Fiscal Year 2011)
“Argon gas cluster ion gun”
