Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS)
PHI nanoTOF ３+
Master surface mass spectrometry of micro-areas with this single instrument
While inheriting the TRIFT type analyzer (Triple Focus Electrostatic Analyzer) with excellent ion transmission characteristics, this instrument adopts the sample transfer mechanism proven in our XPS instruments, and unique ion beam technology enables turnkey charge neutralization. It achieves automated analysis of multiple samples with low noise and high sensitivity. Furthermore, it is a state-of-the-art TOF-SIMS that allows selection of a wide variety of options according to your needs.