{"id":459,"date":"2026-05-21T09:56:50","date_gmt":"2026-05-21T00:56:50","guid":{"rendered":"https:\/\/stag.club-phi.ulvac-phi.com\/products\/"},"modified":"2026-06-30T19:40:33","modified_gmt":"2026-06-30T10:40:33","slug":"products","status":"publish","type":"page","link":"https:\/\/www.ulvac-phi.com\/en\/products\/","title":{"rendered":"Product Information"},"content":{"rendered":"\n
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\n XPS<\/span>\n\nX-ray Photoelectron Spectroscopy<\/span>\n <\/div>\n
\n\n \n
\n \"PHI\n <\/div>\n
\n
\n XPS<\/span>\n <\/div>\n

PHI GENESIS<\/h3>\n

Fully-automated multi-technique scanning XPS\/HAXPES<\/p>\n

Next-generation scanning XPS microprobe achieving both best-in-class spatial resolution and high sensitivity. Rapidly and accurately analyzes the composition and chemical state of battery materials and thin-film devices.<\/p>\n Learn More \u2192<\/span>\n <\/div>\n <\/a>\n\n <\/div>\n<\/section>\n\n

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\n AES<\/span>\n\nAuger Electron Spectroscopy<\/span>\n <\/div>\n
\n\n \n
\n \"PHI\n <\/div>\n
\n
\n AES<\/span>\n <\/div>\n

PHI 710<\/h3>\n

Auger Electron Spectroscopy<\/p>\n

A scanning Auger electron spectroscopy system boasting nanoscale high spatial resolution. Accurately analyzes elemental distribution and chemical states in microscopic regions.<\/p>\n Learn More \u2192<\/span>\n <\/div>\n <\/a>\n\n <\/div>\n<\/section>\n\n

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\n TOF-SIMS<\/span>\n\nTime-of-Flight SIMS<\/span>\n <\/div>\n
\n\n \n
\n \"PHI\n <\/div>\n
\n
\n TOF-SIMS<\/span>\n <\/div>\n

PHI nanoTOF 3+<\/h3>\n

Time-of-Flight SIMS<\/p>\n

A time-of-flight secondary ion mass spectrometry system achieving high sensitivity at the ppm level. Applicable to distribution analysis and depth profiling of trace components in both organic and inorganic materials.<\/p>\n Learn More \u2192<\/span>\n <\/div>\n <\/a>\n\n <\/div>\n<\/section>\n\n

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\n Q-pole-SIMS<\/span>\n\nQuadrupole SIMS<\/span>\n <\/div>\n
\n\n \n
\n \"PHI\n <\/div>\n
\n
\n Q-pole-SIMS<\/span>\n <\/div>\n

PHI ADEPT 2<\/h3>\n

Quadrupole SIMS<\/p>\n

High-sensitivity Q-pole SIMS. Ideal for depth profile analysis of trace elements, providing high reproducibility required in semiconductor process development and quality control.<\/p>\n Learn More \u2192<\/span>\n <\/div>\n <\/a>\n\n <\/div>\n<\/section>\n\n

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\n Software<\/span>\n <\/div>\n
\n \n PHI MultiPak<\/span>\nIntegrated analysis software for surface analysis data. Centralizes peak identification, state analysis, and mapping processing of XPS, AES, and TOF-SIMS data.<\/span>\nView Details<\/span>\n <\/a>\n \n StrataPHI<\/span>\nDepth Profile Analysis Module (MultiPak Option)<\/span>\nView Details<\/span>\n <\/a>\n \n \n TOF-DR<\/span>\n(Coming Soon)<\/span>\nView Details<\/span>\n <\/a>\n <\/div>\n<\/section>\n\n
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\n Books \/ Database<\/span>\n <\/div>\n
\n \n Handbook of X-ray Photoelectron Spectroscopy<\/span>\nXPS Reference Data \u00b7 Standard Handbook of Chemical Binding Energies<\/span>\nView Details<\/span>\n <\/a>\n \n Handbook of Auger Electron Spectroscopy<\/span>\nStandard Handbook of AES Data. Includes Peak Energies and Sensitivity Factors.<\/span>\nView Details<\/span>\n <\/a>\n \n Surface Analysis by Auger and XPS<\/span>\nA specialized reference book covering the theory and practice of surface analysis techniques.<\/span>\nView Details<\/span>\n <\/a>\n \n ToF-SIMS: Materials Analysis by Mass Spectrometry<\/span>\nA specialized reference book explaining the theory and application examples of materials analysis by mass spectrometry.<\/span>\nView Details<\/span>\n <\/a>\n \n XPS Polymer Database<\/span>\nXPS Spectral Database for Polymer Materials<\/span>\nView Details<\/span>\n <\/a>\n \n Static SIMS Library<\/span>\nMass Spectral Library for Static SIMS<\/span>\nView Details<\/span>\n <\/a>\n <\/div>\n<\/section>\n\n
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\n USED EQUIPMENT<\/span>\n
Refurbish<\/div>\n

We also handle the sale of pre-owned surface analysis instruments (XPS \/ AES \/ TOF-SIMS and others). Please feel free to contact us regarding availability, specifications, and pricing.<\/p>\n <\/div>\n <\/div>\n <\/div>\n<\/section>\n\n","protected":false},"excerpt":{"rendered":"

XPS X-ray Photoelectron Spectroscopy XPS PHI GENESIS Fully-automated multi-technique scanning XPS\/HAXPES Next-generation scanning XPS microprobe achieving both best-in-class spatial resolution and high sensitivity. Rapidly and accurately analyzes the composition and chemical state of battery materials and thin-film devices. Learn More \u2192 AES Auger Electron Spectroscopy AES PHI 710 Auger Electron Spectroscopy A scanning Auger electron spectroscopy system boasting nanoscale high spatial resolution. Accurately analyzes elemental distribution and chemical states in microscopic regions. Learn More \u2192 TOF-SIMS Time-of-Flight SIMS TOF-SIMS PHI nanoTOF 3+ Time-of-Flight SIMS A time-of-flight secondary ion mass spectrometry system achieving high sensitivity at the ppm level. Applicable to distribution analysis and depth profiling of trace components in both […]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":65,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_acf_changed":false,"footnotes":""},"class_list":["post-459","page","type-page","status-publish","hentry"],"acf":[],"aioseo_notices":[],"aioseo_head":"\n\t\t\n\t\n\t\n\t\n\t\n\t\t\n\t\t\n\t\t\n\t\t\n\t\t\n\t\t\n\t\t\n\t\t\n\t\t\n\t\t\n\t\t\n\t\t