PHI 700 Xi ™

PHI 700 Xi Scanning Auger Microprobe Auger Electron Spectroscopy (AES, Auger) is an analytical technique that provides compositional and distributional information of elements on the top few monolayers of a material by irradiating an electron beam to the surface of a solid material and measuring the energy of Auger electron emitted from the sample surface. The PHI 700 Xi Scanning Auger Nanoprobe is a high performance surface analysis system that provides nanometer level micro Auger analysis. The acoustic enclosure and the built-in vibration isolators allow compositional and distributional measurement by 500,000 magnification that conventional Auger system never achieved.

Features

The Minimum Spatial Resolution for Scanning Auger Microprobe (SAM) is 8nm or less.
High sensitivity Auger analysis by PHI's patented Cylindrical Mirror Analyzer (CMA).
CMA with Coaxial Electron Gun provides accurate Auger analysis without artifacts caused by sample topography.
High-energy resolution Auger measurement with CMA for spectra acquisition, line profiling, mapping, and depth profiling. Scintillator SEI detector.
Acoustic enclosure and built-in vibration isolators provide improved stability for imaging and analysis.
Floating column ion gun provides a board range of depth profiling and charge neutralization measurement of insulators.
Windows®XP based SmartSoft™-AES software provides a powerful user interface.
Turn key and advanced data manipulation by PHI MultiPak™ data reduction software.

SPEC

SAM Spatial Resolution < 8 nm @ 20 kV, 1 nA
Auger Electron Sensitivity > 700 kcps ( Cu LMM ) above background @ 10 kV, 10 nA, 0.5%
Auger Electron Energy resolution ( HR mode ) 0.1-0.5%
Optional Accessories 6-Sample Parking, Sample cooling fracture, Transfer Vessel Attachment, EBSD,